Vacuum thermocompression machine
Vacuum thermocompression machine for the semiconductor industry.
- Clean room, anhydrous and ESD design
- Protection by automatic door with intelligent restart (automatic process recovery)
- PC base with Objectis Machine touch interface
- Inputs-outputs and axis controllers on EtherCAT, Profibus, RS232 fieldbuses
- Fully digital 125-ton electric compression system with closed-loop control by force sensor
- Distribution of forces by ball joint system on compressed air for alignment, lockable by vacuum
- Vacuum control and management by Pfeiffer digital controller, with partial pressure gas injection system
- Thermal management by Eurotherm multi-loop controller on Profibus
- Heating principle achieved by infrared radiation through transparent material and reflectors
- Real-time visualization and recording of process parameters (forces, positions, temperatures, etc.)
- Motion safety entirely controlled by software (Safety over EtherCAT) with controlled stops
- Different access levels with maintenance key
- Continuous recording of process data and generation of control reports for each assembly
- Intelligent machine monitoring routines to reduce operational downtime
- Rotary, tilting and height adjustable HMI
- Clear and measured workstation lighting